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9 (3): pp, 347–360, 2000. 53. M. A. Abdelmoneum, M. U. Demirci and C. -C. Nguyen, Stemless wine-glass-mode disk micromechanical resonators, Proc. Sixteenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan: pp. 698–701, 1923rd January 2003. 54. J. Wang, J. E. Butler, T. Feygelson and C. -C. 51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp.
11, No. 6: pp. 775–783, 2002. 34. Fluid Mechanics, L. Landau, E. Liftshitz, Pergammon Press, 1959. 35. W. Newell, Miniaturisation of tuning forks, Science, Vol. 161: pp. 1320–1326, 1968. 36. A. P. Wenger, Vibrating fluid densimeters: a solution to the viscosity problem, IEEE Trans on Industrial Electronics and Control Instrumentation, IECI-27 (3): pp. 247–253, 1980. 37. M. Christen, Air and gas damping of quartz tuning forks, Sensors and Actuators A, 4: pp. 555–564, 1983. 38. R. Johnson and A. Barr, Acoustic and internal damping in uniform beams, J.
Hao, A. Erbil, F. Ayazi, An analytical model for support loss in micromachined beam resonators, Sensors and Actuators A, Vol. 109: pp. 156–164, 2003. 33. J. Yang, T. Ono, M. Esashi, Energy dissipation in submicrometer thick single crystal silicon cantilevers, J. Micromech. Systems, Vol. 11, No. 6: pp. 775–783, 2002. 34. Fluid Mechanics, L. Landau, E. Liftshitz, Pergammon Press, 1959. 35. W. Newell, Miniaturisation of tuning forks, Science, Vol. 161: pp. 1320–1326, 1968. 36. A. P. Wenger, Vibrating fluid densimeters: a solution to the viscosity problem, IEEE Trans on Industrial Electronics and Control Instrumentation, IECI-27 (3): pp.